Mass Flow Controller Selection Chart
Measures Any Gas Including Gas Mixtures, Toxics and Corrosives
Accurately controlling the gas flow in your application—whether it’s a gas mixture, toxic gas or corrosive—starts with selecting the right MFC. Sierra’s precision instruments are ideal for very low flows (i.e. 0-10 sccm) as well as higher full-scale flow ranges up to 1000 slpm. High-accuracy digital gas blending and dilution systems offer an accurate and easy solution for multiple gas mixing. Use the gas flow chart below to find the right Sierra flow mass controller for your requirements.
C100H
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C100M
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C100L
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10 sccm to 50 slpm
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C50L
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10 sccm to 50 slpm
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C50M
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C40L
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.06 to .6 slpm
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C40M1
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C40M2
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C40M3
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C30L
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.06 to .6 slpm
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C30M1
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C30M2
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C30M3
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C101
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0.1 sccm to 4 sccm
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C180H
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C180M
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NOTE: Graphs not to scale.
All controllers will measure and control accurately down to 2% of full scale flow rate.
Q: How does a mass flow controller work?
A: Thermal mass flow technology is an industry standard for mass flow control of gases because it measures flow directly, at the molecular level. An MFC for gas automatically controls the flow rate at a given set point. A thermal mass flow controller is designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time. In essence, counting and controlling every gas molecule flowing through the instrument to achieve unmatched precision. Unaffected by upstream gas temperature and pressure fluctuations, gas mass flow control is direct and unequivocal.